Skip to main content Accessibility help
×
Home

Simulation of Collimated Titanium Nitride Physical Vapor Deposition using EVOLVE

  • Anthony J. Toprac (a1), Shi-Qing Wang (a1) (a2), Jim Schlueter (a1) and Timothy S. Cale (a3)

Abstract

Simulation of the physical vapor deposition (PVD) of titanium nitride (TiN) in micronscale contacts was performed using EVOLVE, a physically-based model of non-continuum mass transport. Simulations of uncollimated TiN PVD using a sub-unity sticking coefficient of 0.6 provide accurate model predictions of experimental data. Using this value in simulations of PVD with a 1:1 aspect ratio collimator results in a significant underprediction of titanium nitride deposition in the feature bottom in comparison to the experimental results. This under-prediction was compensated for empirically by adjusting a “beaming” coefficient to produce good model predictions of the experimental data.

Copyright

References

Hide All
1 Cale, T.S.. Flux distributions in low pressure deposition and etch models. J. Vac. Sci. Technol. B, 9(5):2551, 1991.
2 Cale, T.S., Gandy, T.H., and Raupp, G.B.. A fundamental feature scale model for low pressure deposition processes. J. Vac. Sci. Technol. A, 9(3):524, 1991.
3 Cale, T.S. and Raupp, G.B.. A unified line-of-sight model of deposition in rectangular trenches. J. Vac. Sci. Technol. B, 8(6): 1242, 1990.
4 Joshi, R.V. and Brodsky, S., in Proceedings of the Ninth International VLSI Multilevel Interconnection Conference (VMIC), Santa Clara, CA, 1992, page 253.
5 Rogers, B.R., in Cale, T.S. and Pintchovski, F.S., editors, Advanced Metallization for ULSI Applications 1992, volume V8, Mat. Res. Soc., Pittsburgh, PA, 1993, pages 341344.
6 Rogers, B.R. and Cale, T.S.. Spatial composition variation in sputtered ti-w films. Thin Solid Films, 236:334340, 1993.

Simulation of Collimated Titanium Nitride Physical Vapor Deposition using EVOLVE

  • Anthony J. Toprac (a1), Shi-Qing Wang (a1) (a2), Jim Schlueter (a1) and Timothy S. Cale (a3)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed