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Sims and Moke Studies of Fe/Gd Multilayers on Si

Published online by Cambridge University Press:  15 February 2011

Li-Shing Hsu ,
C.-K. Lo ,
Y.-D. Yao  and
C.-S. Yang
Li-Shing Hsu
Affiliation:
Department of Physics, National Chang-Hua University of Education, Chang-Hua, Taiwan, ROC
C.-K. Lo
Affiliation:
Institute of Physics, Academia Sinica, Taipei, Taiwan, ROC
Y.-D. Yao
Affiliation:
Institute of Physics, Academia Sinica, Taipei, Taiwan, ROC
C.-S. Yang
Affiliation:
Institute of Physics, Academia Sinica, Taipei, Taiwan, ROC
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Abstract

Two Fe/Gd/Fe/Gd multilayers with different layer thicknesses were grown on Si (100) by magnetron sputtering. The as-deposited samples were vacuum-annealed at 100°C, 200°C, and 300°C. They were studied by grazing incidence x-ray diffraction (XRD), secondary ion mass spectroscopy (SIMS), vibrating sample magnetometer (VSM) and magneto-optical Kerr effect (MOKE). The deposition rates for Fe and for Gd are (1-2) and 4 Å s−1, respectively. The XRD and SIMS data show that interdiffusion occurs between Fe and Gd layers, and between Gd and Si layers. The thicker multilayers show strong in-plane uniaxial anisotropy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 427: Symposium K – Advanced Metallization for Future ULSI , 1996 , 65
Copyright
Copyright © Materials Research Society 1996

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