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Simple and Effective Way to Improve the Stability of Titanium Based Boron Doped Diamond Film Electrode

Published online by Cambridge University Press:  01 February 2011

Liang Guo  and
Guohua Chen
Liang Guo
Affiliation:
Hong Kong University of Science and Technology, Chemical Engineering, Clear Water Bay, Kowloon, 000000, Hong Kong, 852-23587138, 852-23580054
Guohua Chen
Affiliation:
kechengh@ust.hk, Hong Kong University of Science and Technology, Department of Chemical Engineering, Clear Water Bay, Kowloon, Hong Kong, China, People's Republic of
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Abstract

Boron-doped diamond film coated titanium (Ti/BDD) becomes increasingly attractive because of the combined properties of these two unique materials. The challenge for the composite material is the stability especially when it is used as an electrode. In order to meet this challenge, two temperature (2-temp) staged hot filament chemical vapor deposition method was employed in this study. The accelerated working life time was significantly increased to 804 hours for the 2-temp electrode, compared with 244 hours for the diamond film electrode fabricated under one temperature (1-temp) stage method. With the characterization of micro-Raman, XRD, and cross-sectional SEM, a multilayer of Ti/TiC/(Diamond+Amorphous Carbon)/Diamond can be found in the 2-temp sample and the structure of Ti/TiC/Diamond in the 1-temp sample. There was less void space observed in the interlayer of 2-temp sample. The multi-layered compact structure plays an important role in improving the adhesion of diamond film to the titanium substrate which in turn increases the electrode working life time by over 3 times.

Keywords

chemical vapor deposition (CVD) (deposition)diamondTi
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 956: Symposium J – Diamond Electronics—Fundamentals to Applications , 2006 , 0956-J15-05
Copyright
Copyright © Materials Research Society 2007

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References

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