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Silicon Surface Morphology and the Reaction of Silicon with Oxygen
Published online by Cambridge University Press: 25 February 2011
Abstract
We discuss the measurement of the morphology of exposed surfaces and buried interfaces using plan view transmission electron microscopy techniques. We have observed the evolution of the silicon/oxide interface during both oxidation and oxygen etching of the Si (111) surface. We describe the interface morphology, the mechanisms of these oxidation reactions and the implications of these results for the processing of silicon surfaces.
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- Copyright © Materials Research Society 1992
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