Skip to main content Accessibility help

Silicon Surface Chemistry By IR Spectroscopy in the Mid- To Far-IR Region: H2O And Ethanol On Si(100)

  • L. M. Struck (a1) (a2) (a3), J. Eng (a1), B. E. Bent (a1), Y. J. Chabal (a2), G. P. Williams (a4), A. E. White (a2), S. Christman (a2), E. E. Chaban (a2), K. Raghavachari (a2), G. W. Flynn (a1), K. Radermacher (a5) and S. Mantl (a5)...


The technique of external reflection infrared (IR) spectroscopy is used to study silicon surface chemistry. External reflection is enhanced by implanting a buried cobalt silicide layer in silicon to act as an infrared reflector. The preparation of clean well-ordered surfaces from the ion implanted substrates is demonstrated. The reactions of water and ethanol with Si(100) are investigated.



Hide All
1 Bermudez, V. M., J. Vac. Sci. Technol. A 10, 152 (1992);
(b) McGonigal, M., Bermudez, V. M., and Butler, J. E., J. Elec. Spec. Rel. Phen. 54/55, 1033 (1990).
2 Erley, W., Butz, R, and Mantl, S., Surf. Sci 248, 193 (1991);
(b) Mantl, S. and Bay, H. L., Appl. Phys. Lett. 61, 267 (1992); The CoSi2 layer is prepared in this paper by a deposition process.
3 Chabal, J., Hines, M. A., and Feijóo, D., J. Vac. Sci. Technol. A 13, to be published.
4 White, A- E., Short, K. T., Dynes, R C., Garno, J. P., and Gibson, J. M., Appl. Phys. Lett. 50, 95 (1987);
(b) Hull, R., White, A. E., Short, K. T., and Bonar, J. M., J. Appl. Phys. 68, 1629 (1990).
5 Higashi, G. S., Chabal, Y. J., Trucks, G. W., and Raghavachari, K., Appl. Phys. Lett 56, 656 (1990).
6 Chabal, Y. J., Surf. Sci. 168 594 (1986).
7 Williams, G. P., Int. J. Infrared Millimeter Waves 5, 529 (1984);
(b) Williams, G. P., Nucl. Instrum. Methods A 291, 8 (1990);
(c) Williams, G. P., Rev. Sci. Instrum. 63, 1535 (1992).
8 Ibach, H., Wagner, H., and Bruchmann, D., Solid State Comm. 42, 457 (1982);
(b) Stucki, F., Anderson, J., Lapeyre, G. J., and Farrell, H. H., Surf. Sci. 143, 84 (1984).
9 Chabal, Y. J. and Christman, S. B., Phys. Rev. B 29, 6974 (1984).
10 Struck, L. M., et al., manuscript in preparation.
11 Tedder, L. L., Crowell, J. E., and Logan, M. A., J. Vac. Sci. Technol. A 9, 1002 (1991);
(b) Tedder, L. L., Lu, G., and Crowell, J. E., J. Appl. Phys. 69, 7037 (1991).
12 Edamoto, K., Kubota, Y., Onchi, M., and Nishijima, M., Surf. Sci. 146, L533 (1984);
(b) Stroscio, J. A., Bare, S. R, and Ho, W., Surf. Sci. 154, 35 (1985).
13 Ying, Z. and Ho, W., Surf. Sci. 198, 473 (1988).
14 Shimanouchi, T., Tables of Molecular Vibrational Frequencies, Consolidated Volume I, Nat. Stand. Ref. Data Ser., Nat Bur. Stand. (U.S.) 39 (1972) pp. 104–105;
(b) The Sadtler Handbook of Infrared Spectra, (Philadelphia: Sadtler Research Laboratories, 1978) p. 464.
15 Eng, J. Jr., et al., manuscript in preparation.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed