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Silicon Micro Machining Technologies and Advanced Materials (Porous Silicon and PEEK-WC) for Realization of Micro-PEM Fuel Cells

Abstract

In view of the development of a miniature PEM fuel cell operating at low temperature on hydrogen or direct methanol as anodic feed and air as cathodic feed, we present preliminary results on the performances obtained by employing silicon-based microfabrication techniques and advanced materials which can be easily integrated in silicon technologies, such as porous silicon for the electrode fabrication and PEEK-WC for membranes alternative to Nafion. Powder blasting and reactive ion etching (RIE) have been used for obtaining anode and cathode micro-channels for hydrogen and methanol, in glass and in silicon bipolar plates. Localized micro-fusion processes has been successfully employed for sealing between silicon and membrane.

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1. Yen, T.I., Fang, N., Zhang, X., Lu, G.Q., Wang, C.Y., Appl. Phys. Lett. 83, 4056 (2003)
2. Shah, K., Shin, W.C., Besser, R.S., Sensors and actuators B 97, 157 (2004)
3. Kumar, A., Reddy, R.G., Journal of Power Sources 113, 1118 (2003)
4. Peppley, B. A., Pharoah, J. G., Karan, K., Harvey, D., Hamilton, D. and Sun, W., Mechanistic modeling of PEM Fuel Cells: Application to Serpentine Flow-Fields, European Fuel Cells Forum, Lucerne, 2005
5. Cheng, Y.T., Lin, L., Najafi, K., Journ. Micromech. Systems 9, 3 (2000)
6. Lin, L., IEEE Trans. On Advanced Packaging 23, 608 (2000)
7. Kerres, J‥A., J. of Membrane Science 3, 185 (2001)
8. Rozière, J., Jones, D.J., Annu. Rev. Mater. Res. 33, 503 (2003)
9. Yamaguchi, T., Ibe, M., Nair, B.N., Nakao, S., Journ. of Electrochem. Soc. 149, A1448 (2002)
10. Pichonet, T., Gauthier-Manuel, B., Micromech, J.. Microeng. 15, 179 (2005)
11. Drioli, E., Regina, A., Casciola, M., Oliveti, A., Trotta, F., J. of Membrane Science 228, 139 (2004)
12. Jansen, H. et al. , Microelectronic Engineering 27, 475 (1995)
13. Jansen, H. et al. , J. Micromech. Microeng. 5, 115 (1995)

Keywords

Silicon Micro Machining Technologies and Advanced Materials (Porous Silicon and PEEK-WC) for Realization of Micro-PEM Fuel Cells

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