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Semiconductor surface – molecule interactions: a case study in the wet etching of InP by α-hydroxy acids

  • Prabhakar Bandaru (a1)


The controllable etching of InP semiconductor surfaces is desired in removing damaged layers for facilitating regrowth and obtaining good electronic properties. We have observed that organic acids (α-hydroxy acids: tartaric, lactic, citric and malic) used in conjunction with HCl to etch (100) InP result in smoother and defect free surfaces, in comparison to etches based on inorganic acids alone. The chelating action of the organic acids aids in efficiently removing In from the surface. Based on these results, it is hypothesized that a consideration of the energy levels of the semiconductor and adsorbed molecules could help in devising new semiconductor etchants.


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* Currently at the University of California, San Diego


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1. Liu, W. Fundamentals of III-V devices, John Wiley, New York, 1999.
2. Vrijen, R. et al., Phys. Rev. A 62, 012306 (2000).
3. Yablonovitch, E., et al, Appl. Phys. Lett., 60, 371 (1992).
4. Hoffmann, R. Solids and Surfaces, A chemist's view of bonding in extended structures (VCH Publishers, New York, 1988).
5. Yablonovitch, E., et al, Appl. Phys. Lett., 54, 555 (1989).
6. Vilan, A., Shanzer, A. & Cahen, D. Nature, 404, 166 (2000).
7. Irving, B. A. The Electrochemistry of Semiconductors (ed. Holmes, P. J.) Academic Press, New York, (1962).
8. Faust, J.W., Compound Semiconductors: Preparation of III-V Compounds (eds. Willardson, R. K. & Goering, H. L.) Reinhold Publishing Corp., New York, (1962).
9. Notten, P. H. L., Etching of III-V Semiconductors: An Electrochemical Approach (eds. Meerakker, E. A. M. & Kelly, J. J.) Elsevier, New York, (1991).
10. Vermeir, I. E., Gomes, W. P. & Daele, P. V, Journal of the Electrochemical Society 142, 3227 (1995).
11. Walker, P. CRC Handbook of Metal Etchants (eds. Walker, P. & Tarn, W. H.) CRC Press, Boston, MA, (1991).
12. Gatos, H. C. & Lavine, M. C., J. Phys. Chem. Solids, 14, 169 (1960).
13. Ikossi-Anastasiou, K. et al, J. Electrochem. Soc., 142, 3358 (1995).
14. Elias, P. et al, Mater. Sci. & Engg. B, B66, 15 (1999).
15. Bandaru, P. & Yablonovitch, E., J. Electrochem. Soc., 149, G599 (2002).
16. CRC Handbook of Chemistry and Physics (ed. Lide, D. R.) CRC Press, Boston, (2000).
17. Morrison, R. T. & Boyd, R. N. Organic Chemistry (Allyn & Bacon Inc., Boston, 1983).
18. Houk, K. N. et al. J. Amer. Chem. Soc., 105, 5563 (1983).
19. UV-Vis ATLAS of Organic Compounds (ed. Perkampus, H. H.) (VCH Publishers, New York, 1992).
20. Sze, S. M. Physics of Semiconductor Devices (John Wiley, New York, 1981).
21. Yablonovitch, E., Sandroff, C. J., Bhat, R. & Gmitter, T. J. Appl. Phys. Lett., 51, 439 (1987).


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