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Self-Lubricating, TiN-MoS2 Composite Coatings Produced by Simultaneous Deposition from Ti((CH3) 2N)4/NH3/MoF6/H2S GAS Mixtures

  • Y. W. Bae (a1), W. Y. Lee (a1), T. M. Besmann (a1), P. J. Blau (a1), K. L. More (a1) and D. N Braski (a1)...

Abstract

Composite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.

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2. Hilton, M. R., Bauer, R., Didziuls, S. V., and Fleischauer, P. D., Thin Solid Film 201, 49 (1991).
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4. Bae, Y. W., Lee, W. Y., Besmann, T. M., and Blau, P. J., “Selected Micro-Mechanical Properties of TiN Films Deposited from Ti((CH3) 2N) 4/NH3 Gas Mixtures” Presented at '94 Materials Research Society Fall Meeting, Boston, MA.
5. Blau, P. J. and Yust, C. S., Surface and Coatings Technol., 62, 380 (1993).

Self-Lubricating, TiN-MoS2 Composite Coatings Produced by Simultaneous Deposition from Ti((CH3) 2N)4/NH3/MoF6/H2S GAS Mixtures

  • Y. W. Bae (a1), W. Y. Lee (a1), T. M. Besmann (a1), P. J. Blau (a1), K. L. More (a1) and D. N Braski (a1)...

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