Skip to main content Accessibility help
×
Home

Self-Formation of Au Microwires on Au-Covered Si Electrode Surface by Electrochemical Etching in Dilute Hydrofluoric Acid Solution

  • Yasuo Kimura (a1), Jun Nemoto (a1), Atsushi Kusakabe (a1), Yusuke Kondo (a1) and Michio Niwano (a1)...

Abstract

We have investigated the method of fabricating microstructures on a Si surface that is covered with a patterned gold (Au) mask, by electrochemical etching (anodization) in dilute hydrofluoric acid (HF) solution. We found that at electrode potentials below approximately 0.5 V, the Si surface is preferentially etched on the fringe of the Au mask, where a number of pores are formed. At higher electrode potentials, Au microwires with about 1 µm in width form along the fringe of the Au mask overlayer. We suggest that electromigration of Au towards the fringe of the Au mask induces self-assembling of Au atoms to form microwires. The observed self-formation of metal microwires would be beneficial to the fabrication of metal micro- or nano-structures on Si.

Copyright

References

Hide All
[1] Snow, P. A., Squire, E. K., Russell, St. P. J., and Canham, L. T., J. Appl. Phys. 86, 1781 (1999)
[2] Leth, Hans, Thust, Marion, Steffen, Alfred, Kordos, Peter, Schening, Michael J., Materials Science and Engineering B69–70, 104 (2000)
[3] Smith, R.L. and Collins, S.D., J. Appl. Phys. 71, R1 (1992)
[4] Artmann, Hans, Frey, Wilhelm, Sensors and Actuators 74, 104 (1999)
[5] Ohji, H., Trimp, P.J. and French, P.J., Sensors and Actuators 73, 95 (1999)
[6] Paniccia, M., Flinn, P. and Reifenberger, R., J. Appl. Phys. 73, 8189 (1993)
[7] Bai, S. and Roenker, K. P., J. Appl. Phys. 84, 4248 (1998)

Self-Formation of Au Microwires on Au-Covered Si Electrode Surface by Electrochemical Etching in Dilute Hydrofluoric Acid Solution

  • Yasuo Kimura (a1), Jun Nemoto (a1), Atsushi Kusakabe (a1), Yusuke Kondo (a1) and Michio Niwano (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed