Skip to main content Accessibility help

Self-Aligned Suicides for ULSI

  • Karen Maex (a1) and Rob Schreutelkamp (a1)


Since self-aligned suicides are beginning to be used routinely in integral ULSI processes, critical processing characteristics need to be investigated. In this paper, three relevant issues concerning processing are discussed, namely, the formation of ultra-thin suicides, the silicidation of laterally confined areas and the thermal stability of silicide/Si structures. The technological aspects of TiSi2 and COSi2 are discussed and related to their materials properties.



Hide All
[1] Maex, Karen, Appl. Surf. Sci. 53, 328 (1991).
[2] Maex, K., De Keersmaecker, R. F., Ghosh, G., Delaey, L., and Probst, V., J. Appl. Phys. 66, 5327 (1989).
[3] Probst, V., Schaber, H., Mitwalsky, A., Kabza, H., Hofmann, B., Maex, K. and Van den hove, L., J. Appl. Phys. 70, 693 (1991).
[4] Beyers, R., Coulman, B. and Merchant, P., J. Appl. Phys. 61, 5110 (1987).
[5] Mann, R. W., Racine, C. A., and Bass, R. S., Mat. Res. Soc. Symp. Proc. 224, 115 (1991).
[6] Nemanich, R. J., Jeon, H., Sukow, C. A., Honeycutt, J. W., and Rozgonyi, G. A., these proceedings.
[7] Vandenabeele, P., Schreutelkamp, R. J., Maex, K., Vermeiren, C., and Coppye, W., these proceedings.
[8] Schreutelkamp, R. J., Vandenabeele, P., Deweerdt, B., Coppye, W., Vermeiren, C., Lauwers, A., and Maex, K., these proceedings.
[9] Norström, H., Maex, K. and Vandenabeele, P., Mat. Res. Soc. Symp. Proc. 182, 71(1990).
[10] Norström, H., Maex, K., Romano-Rodriguez, A., Vanhellemont, J. and Van den hove, L., Micro-Electronic Engineering 14, 327 (1991).
[11] Lithomap, Trademark of Prometrix Corp., 3255 Scott Blvd., Bldg. 6, Santa Clara, CA 95054, USA.
[12] Norström, H., Maex, K. and Vandenabeele, P., Thin Solid Films, 198, 53 (1991).
[13] Schreutelkamp, R. J., Deweerdt, B., Verbeeck, R. and Maex, K., European Solid State Device and Research Conference (ESSDERC), Leuven, Belgium, Sept. 1992, to be published in the proceedings.

Self-Aligned Suicides for ULSI

  • Karen Maex (a1) and Rob Schreutelkamp (a1)


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed