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Scanning Optical Fiber Microscope for High Resolution Laser Beam Induced Current Images of Semiconductor Materials

Published online by Cambridge University Press:  25 February 2011

M. Ogura ,
M. Tajima  and
Y. Tokumaru
M. Ogura
Affiliation:
Electrotechnical Laboratory, Sakura-mura, Niihari-gun, Ibaraki 305, Japan.
M. Tajima
Affiliation:
Electrotechnical Laboratory, Sakura-mura, Niihari-gun, Ibaraki 305, Japan.
Y. Tokumaru
Affiliation:
Electrotechnical Laboratory, Sakura-mura, Niihari-gun, Ibaraki 305, Japan.
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Abstract

Laser beam induced current images (LBIC) of polycrystalline silicon and liquid encapsulated Czochralski (LEC) GaAs are observed with a new scanning optical fiber microscope (SOFM), which utilizes an optical fiber as a mobile light source. In this system, fine optical probing with the beam diameter less than lm is achieved without requiring severe mechanical precision. A variety of light sources are employed to reveal different defect species. The distribution of deep levels in LEC GaAs is visualized with extrinsic photo-excitation by using a Nd:YAG laser.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 69: Symposium D – Materials Characterization , 1986 , 251
Copyright
Copyright © Materials Research Society 1986

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References

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