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Scanning Auger Microscopy Characterization of Magnetic Hard Disc

  • D. W. Harris (a1), D. L. Neiman (a2) and J. Huang (a1)

Abstract

Applications of Zalar rotation and field emission Auger (FE-AES) analysis in various magnetic hard disc problems will be presented. These applications include thin layer structure characterization, low concentration contaminant (0.1–0.5 atomic percent) detection at deeper interfaces (greater than 1000Å), and small particle (-∼1000Å) contaminant identification.

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Scanning Auger Microscopy Characterization of Magnetic Hard Disc

  • D. W. Harris (a1), D. L. Neiman (a2) and J. Huang (a1)

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