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Roughness, impurities and strain in low-temperature epitaxial silicon films grown by tantalum filament hot-wire chemical vapor deposition

  • Charles W. Teplin (a1), Matthew Page (a2), Eugene Iwaniczko (a3), Kim M. Jones (a4), Robert M. Ready (a5), Bobby M. To (a6), Helio M. Moutinho (a7), Qi M. Wang (a8) and Howard M. Branz (a9)...

Abstract

We grow epitaxial silicon films onto (100) silicon wafers from pure silane by hot-wire chemical vapor deposition (HWCVD). The films grow epitaxially for a thickness hepi before a Si:H cones nucleate and expand. We study the dependence of hepi on growth rate and the differences between Ta and W filaments. The surface morphology of thin but completely epitaxial films are studied in order to correlate the surface roughness during growth with the eventual epitaxial breakdown thickness. Surface roughness, strain and H at the wafer/film interface are not likely to cause the observed breakdown.

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[1] Bergmann, R.B. and Werner, J.H., Thin Solid Films 403, 162 (2002).
[2] Findikoglu, A., Choi, W., Matias, V., Holesinger, T., Jia, Q. and Peterson, D., Adv. Mat. 17, 1527 (2005).
[3] Fuhs, W., Gall, S., Rau, B., Schmidt, M. and Schneider, J., Solar Energy 77, 961 (2004).
[4] Richardson, C.E., Kayes, B.M., Dicken, M.J. and Atwater, H.A., Amorphous and Nanocrystalline Silicon Science and Technology-2005. Symposium (Materials Research Society Symposium Proceedings Vol.862) 171 (2005).
[5] Eaglesham, D.J., J. Appl. Phys. 77, 3597 (1995).
[6] Eaglesham, D.J., Gossmann, H.J. and Cerullo, M., Phys. Rev. Lett. 65, 1227 (1990).
[7] Murty, M.V.R. and Atwater, H.A., Phys. Rev. B 49, 8483 (1994).
[8] Weir, B., Freer, B., Headrick, R., Eaglesham, D., Gilmer, G., Bevk, J. and Feldman, L., Appl. Phys. Lett. 59, 204 (1991).
[9] Nerding, M., Oberbeck, L., T.Wagner, A., Bergmann, R.B. and Strunk, H.P., J. Appl. Phys. 93, 2570 (2003).
[10] Straub, A., Harder, N.P., Huang, Y.D. and Aberle, A.G., J. Cryst. Growth 268, 41 (2004).
[11] Rau, B., Sieber, I., Selle, B., Brehme, S., Knipper, U., Gall, S. and Fuhs, W., Thin Solid Films 451–52, 644 (2004).
[12] Seitz, H. and Schroder, B., Solid State Commun. 116, 625 (2000).
[13] Teplin, C.W., Wang, Q., Iwaniczko, E., Jones, K.M., Al-Jassim, M., Reedy, R.C. and Branz, H.M., J. Cryst. Growth 287, 414 (2006).
[14] Thiesen, J., Iwaniczko, E., Jones, K.M., Mahan, A. and Crandall, R., Appl. Phys. Lett. 75, 992 (1999).
[15] Mason, M.S., Chen, C.M. and Atwater, H.A., Thin Solid Films 430, 54 (2003).
[16] Richardson, C., Mason, M. and Atwater, H., Thin Solid Films 501, 332 (2006).
[17] Teplin, C.W., Levi, D.H., Iwaniczko, E., Jones, K.M., Perkins, J.D. and Branz, H.M., J. Appl. Phys. 97, (2005).
[18] Teplin, C.W., Levi, D.H., Wang, Q., Iwaniczko, E., Jones, K.M. and Branz, H.M., Amorphous and Nanocrystalline Silicon Science and Technology-2004 (Materials Research Symposium Proceedings Vol.808) 209 (2004).
[19] Teplin, C.W., Iwaniczko, E., Jones, K.M., Reedy, R., To, B. and Branz, H.M., Amorphous and Nanocrystalline Silicon Science and Technology-2005. Symposium (Materials Research Society Symposium Proceedings Vol.862) 177 (2005).
[20] Karpenko, O.P., Yalisove, S.M. and Eaglesham, D.J., J. Appl. Phys. 82, 1157 (1997).
[21] Platen, J., Selle, B., Sieber, I., Brehme, S., Zeimer, U. and Fuhs, W., Thin Solid Films 381, 22 (2001).
[22] Schulze, G. and Henzler, M., Surf. Sci. 124, 336 (1983).
[23] Thiesen, J., Branz, H.M. and Crandall, R.S., Appl. Phys. Lett. 77, 3589 (2000).
[24] Copel, M. and Tromp, R.M., Phys. Rev. Lett. 72, 1236 (1994).
[25] Ji, J. and Shen, T., Phys. Rev. B 70, 115309 (2004).

Keywords

Roughness, impurities and strain in low-temperature epitaxial silicon films grown by tantalum filament hot-wire chemical vapor deposition

  • Charles W. Teplin (a1), Matthew Page (a2), Eugene Iwaniczko (a3), Kim M. Jones (a4), Robert M. Ready (a5), Bobby M. To (a6), Helio M. Moutinho (a7), Qi M. Wang (a8) and Howard M. Branz (a9)...

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