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The Role Of Steps On The Micro Structure Of Titanium-Oxide Films Deposited By Pld Onto (100) Mgo Surfaces

  • Simon King (a1) and C. Barry Carter (a1)

Abstract

The phenomenon of graphoepitaxy, whereby island nucleation occurs preferentially at steps, is a prime example of a manner in which the substrate morphology (and notably surface steps) can affect the microstructure of as-deposited thin-films. This paper provides a further illustration of the fundamental importance of the substrate morphology to the development of the thin-film microstructure, employing the example of TiO2 deposited by pulsed-laser deposition (PLD) directly onto specially prepared (100) MgO TEM foils. The same areas of these foils are imaged both before and after deposition.

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[1] Norton, M.G. and Carter, C.B., Scanning Microsc, 6, 385398 (1992).
[2] Tietz, L.A. and Carter, C.B., Phil. Mag. A, 67, 699727;
[2] Tietz, L.A. and Carter, C.B., Phil. Mag. A, 67, pp. 729744 (1993).
[3] King, S.L. and Carter, C.B., Mat. Res. Soc. Symp. Proc., 280, 157160 (1993).
[4] Norton, M.G. et al, Applied Phys. Lett., 55, 23482350 (1989).
[5] King, S.L. and Carter, C.B. to be submitted (1994a).
[6] King, S.L. and Carter, C.B., 1993, Proc. 2nd Int. Conf. on Laser Ablation, Knoxville, TN, AIP Conf. Proc. 288, 209214.
[7] King, S.L. and Carter, C.B., Proc 51st Ann. Mtg. MSA, Cincinnati, p. 1142 (1993).
[8] Hesse, D. and Bethge, H., J.Cryst. Growth 52, 875882 (1981).
[9] Hesse, D. et al, Physica C 202, 277288 (1992).
[10] King, S.L. and Carter, C.B., to be submitted (1994b).

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The Role Of Steps On The Micro Structure Of Titanium-Oxide Films Deposited By Pld Onto (100) Mgo Surfaces

  • Simon King (a1) and C. Barry Carter (a1)

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