Skip to main content Accessibility help

Role Of Active Oxygen Species On Growth Of ZnO Using RF-PAMBE

  • Steven M. Durbin (a1), William C. T. Lee (a2), Martin Allen (a3), Paul Miller (a4) and Roger J. Reeves (a5)...


The effect of different oxygen species on the RF plasma-assisted molecular beam epitaxy growth of ZnO films has been investigated. By varying the geometry of the aperture plate and also the RF power, the relative atomic content in the discharge was altered, and this is found to be corre-lated to the film quality. Further, growth rate studies performed in tandem with in-situ laser interferometry suggest that stoichiometric conditions may not result in saturation of growth rates.



Hide All
1. Chen, Y., et al. , J. Appl. Phys 84, 3912 (1998).10.1063/1.368595
2. Jung, Y., No, Y., Kim, J., Choi, W., J. Cryst. Growth 267, 85 (2004).10.1016/j.jcrysgro.2004.03.010
3. Sakurai, K., et al. , J. Cryst. Growth 209, 522 (2000).10.1016/S0022-0248(99)00610-7
4. Miyamoto, K., Sano, M., Kato, H., Yao, T., J. Cryst. Growth 265, 34 (2004).10.1016/j.jcrysgro.2004.01.035
5. Murphy, T., Chen, D., Phillips, J., J. Electron. Mat. 34, 699 (2005).10.1007/s11664-005-0006-8
6. Ptak, A.J., et al. , MRS Internet J. Nitride Semicond. Res. 4S1, G3.10 (1999).
7. Anderson, P.A., Reeves, R.J. and Durbin, S.M., Phys. Stat. Sol. (c), (in press).
8. Lee, W.C.T., Miller, P., Swartz, C.H., Myers, T.H., Reeves, R.J., and Durbin, S.M., J. Electron. Mat. (in press).
9. Ko, H., Yao, T., Chen, Y., Hong, S., J. Appl. Phys. 92, 4354 (2002).10.1063/1.1509103



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed