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Role Of Active Oxygen Species On Growth Of ZnO Using RF-PAMBE

  • Steven M. Durbin (a1), William C. T. Lee (a2), Martin Allen (a3), Paul Miller (a4) and Roger J. Reeves (a5)...

Abstract

The effect of different oxygen species on the RF plasma-assisted molecular beam epitaxy growth of ZnO films has been investigated. By varying the geometry of the aperture plate and also the RF power, the relative atomic content in the discharge was altered, and this is found to be corre-lated to the film quality. Further, growth rate studies performed in tandem with in-situ laser interferometry suggest that stoichiometric conditions may not result in saturation of growth rates.

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