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Residual Donors in P-SiC Films

  • W. E. Carlos (a1), W. J. Moorea (a1), P. G. Siebenmann (a1), J. A. Freitas (a2), R. Kaplan (a1), S. G. Bishop (a1), P. E. R. Nordquist (a1), M. Kong (a3) and R. F. Davis (a3)...

Abstract

Electron Spin Resonance (ESR), temperature dependent Hall effect measurements and photoluminesence (PL) are used to examine the assumption that the residual donor in β-SiC films is nitrogen. At low temperatures the ESR has a three line isotropic spectrum which is characteristic of a central hyperfine interaction with nitrogen. The temperature dependence of the intensity of the nitrogen ESR signal correlates with the concentration of un-ionized donors measured by the Hall effect. Donor-Acceptor pair PL spectra are used to establish that the binding energy of the dominant donor in the films is the same as the nitrogen donor observed in Lely-grown samples. Neither PL nor ESR provide any evidence for the presence of a shallower donor.

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Residual Donors in P-SiC Films

  • W. E. Carlos (a1), W. J. Moorea (a1), P. G. Siebenmann (a1), J. A. Freitas (a2), R. Kaplan (a1), S. G. Bishop (a1), P. E. R. Nordquist (a1), M. Kong (a3) and R. F. Davis (a3)...

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