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Research Progresses on High Efficiency Amorphous and Microcrystalline Silicon-Based Thin Film Solar Cells

  • Xinhua Geng (a1), Ying Zhao (a2), Xiandan Zhang (a3), Guofu Hou (a4), Huizhi Ren (a5), Hong Ge (a6) and Xinliang Chen (a7)...

Abstract

This paper reviews our research progresses of hydrogenated amorphous silicon (a-Si:H) and microcrystalline (μc-Si:H) based thin film solar cells. It coves the three areas of high efficiency, low cost process, and large-area proto-type multi-chamber system design and solar module deposition. With an innovative VHF power profiling technique, we have effectively controlled the crystalline evolution and made uniform μc-Si:H materials along the growth direction, which was used as the intrinsic layers of pin solar cells. We attained a 9.36% efficiency with a μc-Si:H single-junction cell structure. We have successfully resolved the cross-contamination issue in a single-chamber system and demonstrated the feasibility of using single-chamber process for manufacturing. We designed and built a large-area multi-chamber VHF system, which is used for depositing a-Si:H/μc-Si:H micromorph tandem modules on 0.79-m2 glass substrates. Preliminary module efficiency has exceeded 8%.

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Research Progresses on High Efficiency Amorphous and Microcrystalline Silicon-Based Thin Film Solar Cells

  • Xinhua Geng (a1), Ying Zhao (a2), Xiandan Zhang (a3), Guofu Hou (a4), Huizhi Ren (a5), Hong Ge (a6) and Xinliang Chen (a7)...

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