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Reparation and Characterization of BST Thin Films with Hybrid Bottom Electrodes

  • Joon-Hyung Ahn (a1), Jeong-Ho Park (a1), Won-Jae Lee (a2) and Ho-Gi Kim (a1)

Abstract

Thin platinum layer was used for the modification of the interface state between (Ba,Sr)TiO3 (BST) thin films and RuO2 bottom electrodes. Pt/RuO2 hybrid bottom electrodes were fabricated with various platinum deposition temperatures by a conventional dc magnetron sputtering method. Although the surface morphology and XRD patterns of BST thin films were not changed, the electrical properties of BST films deposited on Pt/RuO2 hybrid electrodes were improved compared to the films on RuO2 electrodes. Dielectric constant (εr) and leakage current density of BST thin films on Pt/RuO2 hybrid electrodes prepared at the platinum deposition temperature of 400°C were 498 and 8.6 × 10−8 A/cm2 at 1.5V, respectively.

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Reparation and Characterization of BST Thin Films with Hybrid Bottom Electrodes

  • Joon-Hyung Ahn (a1), Jeong-Ho Park (a1), Won-Jae Lee (a2) and Ho-Gi Kim (a1)

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