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Repair of Flat Panel Display Substrates by Laser Direct Writing of Metallic Platinum, Copper and Aluminum and Insulating Aluminum Oxide Utilizing Gas Phase Reactants

Published online by Cambridge University Press:  22 February 2011

J. David Casey  and
Richard A. Comunale
J. David Casey
Affiliation:
Micrion Corporation, One Corporation Way, Peabody, MA 01960
Richard A. Comunale
Affiliation:
Micrion Corporation, One Corporation Way, Peabody, MA 01960
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Abstract

The identification and repair of defects in flat panel displays (FPD's), most especially liquid crystal, are required to achieve acceptable manufacturing yields and reasonable costs. Laser cutting and laser direct writing, from gas phase reactants, are used to repair opens and shorts in conductor lines of FPD substrates (the LI laser repair system). This paper details platinum, copper and aluminum deposition processes including deposition parameters, conductivity data, Auger evaluations and microscopy characterizations. Life-study data on repaired, fully assembled FPD's will be presented. Also the laser direct-writing process for aluminum oxide, used to repair dielectric defects and to passivate metal repairs, will be described. Finally, a unique, localized vacuum system (SPOT VAC™ ), specifically engineered for laser deposition on large (500 × 500mm) flat substrates, will be detailed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 282: Symposium E – Chemical Perspectives of Microelectronic Materials III , 1992 , 197
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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