Skip to main content Accessibility help
×
Home

Relative Stability of Silicon Self-Interstitial Defects

  • G. Subramanian (a1), K.S. Jones (a1), M.E. Law (a2), M.J. Caturla (a3), S. Theiss (a3) and T. Diaz de la Rubia (a3)...

Abstract

{311) defects and dislocation loops are formed after ion-implantation and annealing of a silicon wafer. Recent Transmission Electron Microscopy studies by Li and Jones have shown that sub-threshold dislocation loops nucleate from {311} defects. In our study, the conjugate gradient method with the Stillinger Weber potential is used to relax different configurations such as {311} defects with a maximum of five chains and perfect dislocation loops. From the formation energies thus obtained we find that there is an optimal width for each length of the {311} defects. Moreover the relative stability of {311}s and loops is studied as a function of defect size. We observe that at very small sizes the perfect loops are more stable than the {311}s. This may provide an explanation for the experimental observation by Robertson et al that, in an annealing study of end of range damage of amorphized samples, 45% of the loops had nucleated in the first 10 minutes of anneal. Out of these 25% of the loops could not have nucleated by unfaulting of {311}s. We propose that homogeneous nucleation, as against unfaulting of the {311}s, could be the source of these sub-microscopic loops.

Copyright

References

Hide All
1. Eaglesham, D. J., Stolk, P. A., Gossman, H.J. and Poate, J. M., Appl. Phys. Lett. 65, 2305 (1994).10.1063/1.112725
2. Wu, W. K. and Washburn, J., J.Appl.Phys. 48, 3744 (1977).
3. Tan, T. Y., Phil. Mag., 44, 101 (1981).10.1080/01418618108244497
4. Li, Jinghong and Jones, Kevin S., Appl. Phys. Lett. 73 (25), 3748 (1998)10.1063/1.122882
5. Robertson, L. S., Jones, K.S., Rubin, L.M. and Jackson, J., J.Appl.Phys. 87(6), 2910 (2000).10.1063/1.372276
6. Stillinger, Frank H. and Weber, Thomas A., Phys. Rev. B, 31, 5262 (1985).10.1103/PhysRevB.31.5262
7. Kim, Jeongnim, Wilkins, John W., Khan, Furrukh S., Andrew Canning, Phys. Rev. B, 55 (24), 16186 (1997).10.1103/PhysRevB.55.16186

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed