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The Relationship Between Crystal Structure and Hardness of Nitrogen Implanted Iron Surface Layers

Published online by Cambridge University Press:  25 February 2011

Takanobu Fujihana ,
Yoshio Okabe  and
Masaya Iwaki
Takanobu Fujihana
Affiliation:
Advanced Technology Inc., Nase 84, Totsuka, Yokohama, Kanagawa, 245 JAPAN
Yoshio Okabe
Affiliation:
Saitama Institute of Technology, Okabe-machi, Ohsato, Saitama, 362-02 JAPAN
Masaya Iwaki
Affiliation:
RIKEN (The Institute of Physical and Chemical Research), Hirosawa 2-1, Wako, Saitama, 351-01 JAPAN
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Extract

A study has been made of the relationship between crystal structure and hardness of N-implanted Fe-surface layers. The substrates used were polycrystalline Fe-sheets 1 mm thick with a purity of 99.9 %. The ion implantation of 14N+ was performed with doses ranging from 7.5×1016 to 1×1018 ions/cm2 at an energy of 100 keV. The substrate temperatures during implantation were kept at -40, 20, 100 and 200 °C. The crystal structure of N-implanted layers was identified by X-ray diffraction method (XRD). The near surface hardness was measured by a Knoop hardness tester. The XRD patterns revealed that the iron-nitride peculiar to each implantation condition was formed, and the iron-oxide was embedded in the nitrides in case of higher temperature implantation. N-implantation led to hardness increase, whose degree also depended on implantation conditions. The comparison between the structure and hardness of implanted layers indicated that, among the phases of iron-nitrides produced by 20 °C implantation, ε-phase is the hardest and the γ-Fe203 and γ'-Fe4N formed by 200 °C implantation are harder than the ε-phase nitrides. These results are discussed with respect to the surface composition estimated by Rutherford backscattering spectrometry (RBS) using 1.5 MeV 4He+-ions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 128: Symposium A – Processing and Characterization of Materials Using Ion Beams , 1988 , 415
Copyright
Copyright © Materials Research Society 1989

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References

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