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Reflection High-energy Electron Diffraction Study of Nanostructures: From Diffraction Patterns to Surface Pole Figure

  • Fu Tang (a1), Toh-Ming Lu (a2) and Gwo Ching Wang (a3)


In this report we present a brief overview of the growth of nanostructures by the oblique angle deposition where the nanostructures possess both out-of-plane and in-plane preferred orientations or a biaxial texture. The degree of preferred crystal orientations can be quantitatively determined from a method called “RHEED surface pole figure analysis” that we developed recently.



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