Skip to main content Accessibility help
×
Home

Real-Time in Situ Imaging of the Delamination of thin Ta Films on Si(100) Substrates Via a Synchrotron Radiation Technique

  • B. L. French (a1) and J. C. Bilello (a1)

Abstract

The thermal stress-induced delamination of 500nm polycrystalline Ta coatings on Si(100) substrates was studied via a recently developed real-time in situ imaging technique. This method used white beam synchrotron (on SSRL station 2-2) Laue transmission diffraction topography coupled with simultaneous direct radiography to record the thermomechanical failure modes of the Ta films as a function of temperature. The observations were made using a novel experimental apparatus, consisting of a 600°C hot stage and a portable CCD x-ray imaging/storage system with ~20m m resolution. The system is capable of recording 30 images/sec; hence, at moderate strain rates not only was the morphology of failure evident, but detailed study of the dynamics of delamination was also possible. The mode of failure and the adhesion strength are correlated with the physiochemical nature of the coating-substrate interface, and also with the degree of in-plane/out-of-plane texture of the Ta films. These observations should be capable of extension to the study of a variety of adhesion and cyclic failure issues in thin coatings.

Copyright

References

Hide All
1. Lang, A. R., Acta Crystallogr. A, 28, S168 (1972); Acta Metall., 5, 358 (1957).
2. Zhao, Z. B., Hershberger, J., Rek, Z. U., and Bilello, J. C., Mat. Res. Soc. Symp. Proc., 502, 163 (1998).
3. Zhao, Z. B., Rek, Z. U., and Bilello, J. C., Phil. Trans. R. Soc. Lond. A, 357, 2681 (1999).
4. Kuo, C. L., Vanier, P. E., and Bilello, J. C., J. Appl. Phys., 55 (2), 375 (1984).
5. Cullity, B. D., Elements of X-ray Diffraction, 2nd ed., (Addison-Wesley Publishing Company, Inc., 1978) p. 292.
6. Toney, M. F., Huang, T. C., Brennan, S., and Rek, Z., J. Mater. Res, 3 (2), 351 (1988).
7. Evans, A. G. and Hutchinson, J. W., Int. J. Solids Structures, 20 (5), 455 (1984).
8. Hutchinson, J. W., Thouless, M. D., and Liniger, E. G., Acta metall. Mater., 40 (2), 295 (1992).

Related content

Powered by UNSILO

Real-Time in Situ Imaging of the Delamination of thin Ta Films on Si(100) Substrates Via a Synchrotron Radiation Technique

  • B. L. French (a1) and J. C. Bilello (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.