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Reactive Sputtering of Magnesium Hydride Thin Films for Photovoltaic Applications

  • Charlotte Platzer-Björkman (a1), Trygve Mongstad (a2), Smagul Zh. Karazhanov (a3), Jan-Petter Maehlen (a4), Erik Stensrud Marstein (a5) and Arve Holt (a6)...

Abstract

Deposition of MgHx (MgH2 + Mg) thin films is performed using RF reactive sputtering in argon-hydrogen plasma. Films are characterized using x-ray diffraction (XRD), scanning electron microscopy, optical and resistivity measurements. Formation of crystalline MgH2 is confirmed by XRD, but the formation of some metallic Mg in the films could not be avoided. Increased H/Mg ratio by deposition at high hydrogen flow or high total pressure gives films that oxidize within days or weeks. Deposition at elevated substrate temperature results in improved crystallinity and stability. Initial studies of MgHx for silicon surface passivation are presented.

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1 Karazhanov, S. Ulyashin, A. Vajeeston, P. et al., Phil. Mag 88, 2461 (2008).
2 Isidorsson, J. Giebels, I. Arwin, H. et al., Physical Review B 68, 115112 (2003).
3 Zaluska, A. Zaluski, L. and Ström-Olsen, J., Journal of Alloys and Compounds 288, 217 (1999).
4 Giebels, I. Isidorsson, J. and Griessen, R. Physical Review B 69, 205111 (2004).
5 Westerwaal, R. Broedersz, C. Gremaud, R. et al., Thin Solid Films 516, 4351 (2008).
6 Zeng, K. Klassen, T. Oelerich, W. et al., Journal of Alloys and Compounds 283, 213 (1999).
7 Isetti, G. Period. Mineral. 34, 327 (1965).
8 Dougherty, D. and Herley, P. Journal of the Less-Common Metals 73, 97 (1980).

Keywords

Reactive Sputtering of Magnesium Hydride Thin Films for Photovoltaic Applications

  • Charlotte Platzer-Björkman (a1), Trygve Mongstad (a2), Smagul Zh. Karazhanov (a3), Jan-Petter Maehlen (a4), Erik Stensrud Marstein (a5) and Arve Holt (a6)...

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