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Reactive Ion Etching of WSi0.6 Gates for GaAs MESFETS

  • C. L. Lin (a1) and Peter D. Hoh (a1)


A process for reactive ion etching of 1μm and sub-micron WSi0.6 gates for GaAs MESFET integrated circuits has been developed.Using a CF4/O2 plasma, a 200am film of WSi0.6 could be etched in ≃ 5 minutes.This is sufficiently long for accurate process monitoring.A vertical edge profile has been obtained which is desirable for a self-aligned MESFET process.To achieve the vertical edge, careful control of the degree of over etch was necessary.This was accomplished by monitoring the intensity profile of a laser beam reflected from the wafer being etched.The widths of lines etched in WSi0.6 closely matched those of the resist pattern.Both 1μm and sub-micron FET's were fabricated.with excellent linewidth control and electrical characteristics



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1. Doerbeck, F.H., “A planar gallium arsenide FET with a self-aligned Schottky barrier gate,” presented at the 3rd Int.Symp.on GaAs and Related Compounds, Aachen, Germany, OcL 1970.
2. Yokoyama, N., Mimura, T., Fukuta, M., and Ishikawa, H., “A self-aligned source/drain planar device for ultrahigh-speed GaAs MESFET VLSI's,” in 1981 Int.Solid-State Circuits Conf., Dig.Tech.Papers, Feb.1981, pp.218–9.
3. Abe, M., Mimura, T., Yokoyama, N., and Ishikawa, H., “New technology towards GaAs LSI/VLSI for computer applications,” IEEE Trans.Electron Devices, vol.ED–29, pp.1088–93, 1982.
4. Willianms, R., Gallium Arsenide Processing Techniques, Artech House, 1984.
5. Yokoyama, N., Ohnishi, T., Onodera, H., Shinoki, T., Shibatomi, A., Ishikawa, H. “A GaAs IK Ram using Tungsten-Silicide Gate Self-Alignment Technology” IEEE Internat.onal Solid-State Circuits Conference pp.44–45, 1983
6. Coburn, J.W., Plasma Etching and Reactive Ion Etching, American Vacuum Society, American Institute of Physics, Inc., 1982.
7. Harshbarger, W.R. et al, Appl.Spectrosc. 31 201 (1977)
8. Mogab, C.I., Adams, A.C., Flamm, D.L., J. Appl. Phys. 49 3796 (1978)


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