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Rapid Thermal Annealing of Spin-On Glass Films
Published online by Cambridge University Press: 22 February 2011
Abstract
Rapid thermal annealing is investigated for curing spin-on glass insulating films. The annealed SOG films were mainly evaluated using infrared absorption spectroscopy and by electrical measurement of the defects present at the Si/Sio2 interface. We found in particular after rapid thermal annealing an important densification of the layers as a function of temperature and a reduction of the interfacial state densities which are comparable to classical thermal oxides.
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- Copyright © Materials Research Society 1993
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