Skip to main content Accessibility help
×
Home

Raman Spectroscopy of Amorphous Carbon

  • D. R. Tallant (a1), T. A. Friedmann (a1), N. A. Missert (a1), M. P. Siegal (a1) and J. P. Sullivan (a1)...

Abstract

Amorphous carbon is an elemental form of carbon with low hydrogen content, which may be deposited in thin films by the impact of high energy carbon atoms or ions. It is structurally distinct from the more well-known elemental forms of carbon, diamond and graphite. It is distinct in physical and chemical properties from the material known as diamond-like carbon, a form which is also amorphous but which has a higher hydrogen content, typically near 40 atomic percent. Amorphous carbon also has distinctive Raman spectra, whose patterns depend, through resonance enhancement effects, not only on deposition conditions but also on the wavelength selected for Raman excitation. This paper provides an overview of the Raman spectroscopy of amorphous carbon and describes how Raman spectral patterns correlate to film deposition conditions, physical properties and molecular level structure.

Copyright

References

Hide All
1. Xiong, , Wang, Y. Y. and Chang, R. P. H., Phys. Rev. B 48, p. 8016 (1993).
2. Friedmann, T. A., McCarty, K. F., Barbour, J. C., Siegal, M. P. and Dibble, D. C., Appl. Phys. Lett. 68, 1643(1996).
3. Robertson, J., Prog. Solid State Chem. 21, p. 199 (1991).
4. Marks, N. A., McKenzie, D. R., Pailthorpe, B. A., Bernasconi, M. and Parrinello, M., Phys. Rev. Lett. 76, p. 768 (1996).
5. Nelson, S., Stechet, E. B., Wright, A. F., Plimpton, S. J., Schultz, P. A. and Sears, M. P., Phys. Rev. B 52, p. 9354 (1995).
6. Schultz, P. A. and Stechel, E. B., Phys. Rev. B (in press).
7. Gilkes, W. R., Sands, H. S., Batchelder, D. N., Robertson, J. and Milne, W. I., Appl. Phys. Lett. 70, p. 1980 (1997).
8. Wang, Y., Alsmeyer, D. C and McCreery, R. L., Chem. Mater. 2, p. 557 (1990).
9. Tuinstra, F. and Koenig, J. L., J. Chem. Phys. 53, p. 1126 (1970).
10. Merkulov, V. I., Lannin, J. S., Munro, C. H., Asher, S. A., Veerasamy, V. S. and Milne, W. I., Phys. Rev. Lett. 78, 4869 (1997).
11. Sullivan, J. P., Friedmann, T. A. and Baca, A.G., J. Electr. Mat. 26, p. 1021 (1996).
12. Yoshikawa, M., Mori, Y., Obata, H., Maegawa, M., Katagiri, G., Ishida, H. and Ishitani, A., Appl. Phys. Lett. 67, p. 694 (1995).
13. Poliak, F. H., Test and Measurement World, p. 2 (May, 1985).
14. Sullivan, J. P. and Friedmann, T. A., in Proc. First International Specialist Meeting on Amorphous Carbon, (World Scientific Publishing, Singapore, 1997), Cambridge U. K., 1997.
15. Maddams, W.F., American Laboratory, p. 59 (March, 1986).
16. See the cover and articles of the MRS bulletin, November, 1994.
17. Doyle, T. E. and Dennison, J. R., Phys. Rev. B. 51, p. 196 (1995).

Raman Spectroscopy of Amorphous Carbon

  • D. R. Tallant (a1), T. A. Friedmann (a1), N. A. Missert (a1), M. P. Siegal (a1) and J. P. Sullivan (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed