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Raman Spectroscopy: A Unique Tool for the Study of Thin Films

Published online by Cambridge University Press:  14 March 2011

Ingrid De Wolf
Ingrid De Wolf*
Affiliation:
IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium, dewolfi@imec.be
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Abstract

In this paper, the different applications of Raman spectroscopy for the study of thin films is briefly discussed, using examples from microelectronics. Special attention is given to the application of micro-Raman spectroscopy for the measurement of local stress in and near films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 615: Symposium G – Polycrystalline Metal & Magnetic Thin Films - 2000 , 2000 , G8.1.1
Copyright
Copyright © Materials Research Society 2000

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References

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