Skip to main content Accessibility help
×
Home

Raman Spectroscopic Evaluation of Silicides Formed with A Scanned Electron Beam

  • R. J. Nemanich (a1), T. W. Sigmon (a1) (a2), N. M. Johnson (a1), M. D. Moyer (a1) and S. S. Lau (a1) (a3)...

Abstract

Raman scattering and Rutherford backscattering are used to study the products of SEM processing of Pd and Pt thin films on Si(100) substrates. The RBS measurements indicate the compositional depth profile of the resulting silicide while the Raman scattering indicates the crystal structure. For both cases it is found that the resultant silicide is dominated by Pd2 Si (or Pt2Si) structures but evidence of deviations are also noted.

Copyright

References

Hide All
1. See for example Thin Films - Interdiffusion and Reactions, Poate, J. M. et al. , eds. (Wiley, New York, 1978).
2. Murarka, S. P., J. Vac. Sci. Technol. 17, 775 (1980).
3. Poate, J. M., Leamy, H. J., and Sheng, T. T., Appl. Phys. Letters 33, 918 (1978).
4. Allmen, M. von and Wittmer, M., Appl. Phys. Letters 34, 68 (1979).
5. Nava, F., Majni, G., Luches, A., Nassisi, V., and Janniti, E., Journal de Physique, Colloque C4, Supplement #5, Vol. 41, p. C497 (May 1980).
6. Shibata, T., Sigmon, T. W., and Gibbons, J. F., Laser and Electron Beam Processing of Materials, White, C. W. and Peercy, P. S., eds. (Academic Press, New York, 1980), pp. 530536.
7. Sigmon, T. W., Regolini, J. L., Gibbons, J. F., Lau, S. S., and Mayer, J. W., Laser and Electron Beam Processing of Electronic Materials, Anderson, C. L. et al. , eds., (The Electrochemical Society, Inc., Princeton, 1980), pp. 531533.
8. For a more complete description of Raman scattering see articles in Light Scattering in Solids, Cardona, M. ed. (Springer-Verlag, New York, 1975).
9. Tsai, C. C., Nemanich, R. J. and Sigmon, T. W., Proc. 15th Int. Conf. Physics of Semiconductors, J. Phys. Soc. Japan 49 Suppl. A, 1265 (1980).
10. Ratnakumar, K. N., Pease, R. F. W., Bartelink, D. J., and Johnson, N. M., J. Vac. Sci. Technol. 16, 1843 (1979).
11. Elliott, R. P., Constitution of Binary Alloys, First Supplement (McGraw-Hill, New York, 1965) p. 731.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed