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Radiofrequency Discharge Modeling

  • J. P Boeuf (a1), Ph Belenguer (a1) and J. Wang (a2)

Abstract

Selfconsistent fluid models of radiofrequency discharges in helium and silane are presented. The role of the sheath and plasma electric field in the electron energy gain and deposition mechanisms in both cases are discussed.

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Radiofrequency Discharge Modeling

  • J. P Boeuf (a1), Ph Belenguer (a1) and J. Wang (a2)

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