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Pzt Interaction with Metal and Oxides Studied by Rutherford Backscattering Spectrometry

  • Peter Revesz (a1), Jian Li (a1), Nicholas Szabo (a1), James W. Mayer (a1), David Caudillo (a2) and Edward R. Myers (a2)...

Abstract

Annealing behavior in oxygen ambients of the of the ferroelectric PZT on Hf and Zr electrodes has been studied in the temperature range of 500-800°C using the 3.045MeV O16(∝,∝)O16 resonance in backscattering spectrometry. Internal oxidation of the buried metal electrode was observed. Oxygen concentration of the PZT film decreases with increasing temperature. Pb loss of the PZT film occurred above 700°C.

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[1] Krishnakumar, S., Esener, S.C., Fan, C., Ozguz, H.V., Title, M.A., Cozzolino, C. and Lee, S.L. in Ferroelectric Thin Films, edited by Myers, E.R. and Kingon, A.I. (Mater. Res. Soc Proc. 200 Pittsburgh, PA 1990. pp 9196.
[2]Parikh, N.A., Stepen, J.T., Swanson, M.L. andMyers, E.R., Ferroelectric Thin Films, edited by Myers, E.R. and Kingon, A.I. (Mater. Res. Soc Proc. 200 Pittsburgh, PA 1990. 193196.
[3]Sreenivas, K., Sayer, M., Laursen, T., Whitton, J.L., Pasqual, R., Johnson, D.j., Amm, D.T., Sproule, G.I., Mitchell, D.F., GrahamS, M.J..Gujrathy, C. andOxom, K., Ferroelectric Thin Films, edited by Myers, E.R. and Kingon, A.I. (Mater. Res. Soc Proc. 200 Pittsburgh, PA 1990. 255260.
[4] Dey, S.K. andZuleeg, R., Ferroeletrics, 108, 37, (1990)
[5]Blanpain, B., Revesz, P., Doolittle, L.R., Purser, K.H. andMayer, J.W., Nucl. Instr. and Meth. B34, 459, (1988)
[6]Li, J., Matienzo, L.J., Revesz, P., Vizkelethy, G., Wang, S.Q., Kaufnarn, J.J. and Mayer, J.W., Nucl. Instr. and Meth. B46, 287, (1990)
[7]Li, J., Vizkelethy, G., Revesz, P. and Mayer, J.W., Nucl. Instr. and Meth. B to be published
[8]Wang, S.Q. and Mayer, J.W., J. Appl.Phys. 64 (9), p 4711. (1988)

Pzt Interaction with Metal and Oxides Studied by Rutherford Backscattering Spectrometry

  • Peter Revesz (a1), Jian Li (a1), Nicholas Szabo (a1), James W. Mayer (a1), David Caudillo (a2) and Edward R. Myers (a2)...

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