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Pyrolytic Laser Direct Writing of Nickel Over Polyimides

  • S. J. Bezuk (a1), R. J. Baseman (a1), C. Kryzak (a1), K. Warner (a1) and G. Thomes (a1)...

Abstract

Polyimides are of great interest as insulators for microelectronic fabrication due to their low dielectric constant and planarizing properties. However, they are thermally sensitive films. Nonetheless, preliminary results clearly demonstrate that nickel lines readily can be laser-pyrolytically drawn over polyimide films.

While elevated laser power will damage underlying polyimide films, microelectronic quality nickel lines can be drawn using nickel carbonyl at relatively low laser intensities over polyimides with little or no change in the electrical characteristics. Polyimide's lower thermal conductivity relative to silicon dioxide facilitates increased nickel deposition rates. Self-limiting effects have been observed during the deposition that can lead to near microelectronically ideal line cross sections.

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Pyrolytic Laser Direct Writing of Nickel Over Polyimides

  • S. J. Bezuk (a1), R. J. Baseman (a1), C. Kryzak (a1), K. Warner (a1) and G. Thomes (a1)...

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