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Pulse-to-Pulse Laser Stability Effects on Multiple Shot Excimer Laser Crystallized a-Si Thin Films

  • R. I. Johnson (a1), G. B. Anderson (a1), J. B. Boyce (a1), D. K. Fork (a1), P. Mei (a1) and S. E. Ready (a1)...

Abstract

Laser crystallized amorphous silicon thin films on quartz exhibit a peak in the grain size, electron mobility and the Si (111) x-ray intensity as a function of the laser fluence, substrate temperature, film thickness, and the number of laser shots per unit area. The peak in grain size has also been shown to be dependent: on the stability of the pulse-to-pulse laser energy density, particularly at high shot densities. The shape of the distribution profile of the pulse-to-pulse laser fluence can significantly alter the grain growth at higher shot densities. The modified growth can be expressed by a simple model based on the mean and standard deviation of the laser energy density relative to the characteristic fluence at which the grain size, mobility, and Si (111) x-ray intensities are maximized.

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Pulse-to-Pulse Laser Stability Effects on Multiple Shot Excimer Laser Crystallized a-Si Thin Films

  • R. I. Johnson (a1), G. B. Anderson (a1), J. B. Boyce (a1), D. K. Fork (a1), P. Mei (a1) and S. E. Ready (a1)...

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