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Pulsed Laser Deposition of Epitaxial LiNbO3 Films on Sapphire Substrates Using a Single Crystal Targets

  • See-Hyung Lee (a1), Tae W. Noh (a1), Jai-Hyung Lee (a1) and Young-Gi Kim (a2)

Abstract

Pulsed laser deposition was used to grow epitaxial LiNbO3 films on sapphire(0001) substrates with a single crystal LiNbO3 target. Using deposition temperatures below 450 °C, LiNbO3 films with correct stoichiometry could be grown without using Li-rich targets. Rutherford backscattering spectrometry measurements showed that the oxygen to niobium ratio is 3.00 ± 0.15 to 1.00. It was also found that the crystallographic orientations of the LiNbO3 films could be controlled by adjusting the oxygen pressure during deposition. An x-ray pole figure shows that epitaxial LiNbO3 films were grown on sapphire(0001), but with twin boundaries.

Copyright

COPYRIGHT: © Materials Research Society 1995

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1. Kanato, T., Kobayashi, Y., and Kubota, K., J. Appl. Phys. 62, 2989 (1987)
2. Rost, T.A., Rabson, T.A., Stone, B.A., Callahan, D.L., and Baumann, R.C., IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38, 640 (1991)
3. Betts, R.A., and Pitt, C.W., Electron. Lett. 21, 960 (1985)
4. Yamada, A., Tamada, H., and Saitoh, M., Appl. Phys. Lett. 61, 2848 (1992)
5. Wernberg, A.A., Gysling, H.J., Filo, A.J., and Blanton, T.N., Appl Phys. Lett. 62, 946 (1993)
6. Shibata, Y., Kaya, K., Akashi, K., Kanai, M., Kawai, T., and Kawai, S., Appl. Phys. Lett. 61, 1000 (1992); in
Laser Ablation in Materials Processing: Fundamentals and Applications, edited by Braren, B., Dubowski, J.J., and Norton, D.P. (Mater. Res. Soc. Pro. 285, Pittsbergh, PA, 1992) pp. 361–366
7. Marsh, A.M., Harkness, S.D., Qian, F., and Singh, R.K., Appl. Phys, Lett. 62, 952 (1993)
8. Liu, J. -M., Liu, Z.G., Zhu, S.N., and Wu, Z. C., Mater. Lett. 20, 35 (1994)
9. De Sario, M., Armenise, M.N., Canali, C., Camera, A., Mazzoldi, P., and Ceotti, G., J. Appl. Phys. 57, 1482 (1985)
10. Weis, R.S. and Gaylord, T.K., Appl. Phys. Lett. 37, 191 (1985)

Pulsed Laser Deposition of Epitaxial LiNbO3 Films on Sapphire Substrates Using a Single Crystal Targets

  • See-Hyung Lee (a1), Tae W. Noh (a1), Jai-Hyung Lee (a1) and Young-Gi Kim (a2)

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