Skip to main content Accessibility help
×
Home

Properties Oftetrahedralamorphous Carbon Films Deposited By the Filtered Cathodicarc Method

  • Naruhisa Nagata (a1), Kazuhiro Kusakawa (a1), Akiyasu Kumagai (a1) and Hideaki Matsuyama (a2)

Abstract

First, we studied the relation between the sp3 bond ratio and the hardness of 100-nm-thick tetrahedral amorphous carbon (ta-C) films deposited by a Filtered Cathodic Arc (FCA) system at different substrate bias voltages. For comparison, sputtered amorphous carbon (a-C) films and Highly Oriented Pyrolytic Graphite (HOPG) were also analyzed. According to the results, ta-C film deposited at a -70 volt substrate bias voltage had high hardness and high sp3 bond ratio of up to 88 GPa and 85%, respectively, whereas those of sputtered a-C were 29 GPa and 28%. Furthermore, we found that the hardness of carbon films, including sputtered a-C and HOPG, increased with increasing sp3 bond ratio. Based on this relation, the chemical bond structures of carbon films are considered to be closely related to their mechanical properties. Secondly, we investigated the relation between sp3 bond ratio and ta-C film thickness, over the range from 1 to 10 nm. The measurements showed that a 2-nm-thick initial layer grown on the surface of CoCrPt magnetic film had low sp3 bond ratios. It is suggested that this reduction in sp3 bond ratio in the initially grown layer seriously degrades the film's performance as a hard disk media overcoat. Further efforts to improve ta-C film processing will be required to improve its mechanical properties.

Copyright

References

Hide All
[1] Jacob, W. and Möller, W., Appl. Phys. Lett., 63 (13), 1771 (1993)
[2] Ferrari, A. C. and Robertson, J., Phys. Rev. B, 61, 14095 (2000)
[3] Anders, S., Anders, A., and Brown, I., J. Appl. Phys., 75 (10), 4895 (1994)
[4] Anders, A., Anders, S., and Brown, I., J. Appl. Phys., 75 (10), 4900 (1994)
[5] Zhitomirsky, V. N., Boxman, R. L., and Goldsmith, S., J. Vac. Sci. Technol. A, 13 (4), 2233 (1995)
[6] Shi, X., Tay, B. K., Flynn, D. I., Ye, Q., Sun, Z., Surf. Coat. Technol., 94/95, 195 (1997)
[7] Hyodo, H., Yamamoto, T., and Toyoguchi, T., IEEE Trans. Magn., 37 (4), 1789 (2001)
[8] Tsuji, H., Nakamura, S., Yoshihara, T., Gotoh, Y. and Ishikawa, J., J. Vac. Soc. Jpn., 42 (3), 221 (1999)
[9] Díaz, J., Paolicelli, G., Ferrer, S., and Comin, F., Phys. Rev. B, 54, 8064 (1996)
[10] Proctor, A. and Sherwood, P. M. A., Anal. Chem., 54, 13 (1982)
[11] Lifshitz, Y., Kasi, S. R., and Rabalais, J. W., Phys. Rev. Lett., 62, 1290 (1989)

Properties Oftetrahedralamorphous Carbon Films Deposited By the Filtered Cathodicarc Method

  • Naruhisa Nagata (a1), Kazuhiro Kusakawa (a1), Akiyasu Kumagai (a1) and Hideaki Matsuyama (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed