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Properties of the surface-modified layer of plasma-oxidized poly(dimethylsiloxane)

Published online by Cambridge University Press:  01 February 2011

Kristen L. Mills ,
Xiaoyue Zhu ,
Donghee Lee ,
Shuichi Takayama  and
M. D. Thouless
Kristen L. Mills
Affiliation:
klmills@engin.umich.edu, University of Michigan, Mechanical Engineering, 2250 G.G. Brown, 2350 Hayward, Ann Arbor, MI, 48109, United States, (734) 763-6901
Xiaoyue Zhu
Affiliation:
xiaoyue@umich.edu, University of Michigan, Department of Biomedical Engineering, Ann Arbor, MI, 48109, United States
Donghee Lee
Affiliation:
donghl@umich.edu, University of Michigan, Department of Mechanical Engineering, Ann Arbor, MI, 48109, United States
Shuichi Takayama
Affiliation:
takayama@umich.edu, University of Michigan, Department of Biomedical Engineering, Ann Arbor, MI, 48109, United States
M. D. Thouless
Affiliation:
thouless@umich.edu, University of Michigan, Department of Mechanical Engineering, Ann Arbor, MI, 48109, United States
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Abstract

Exposure of poly(dimethylsiloxane) (PDMS) to oxygen plasma creates a thin, stiff surface-modified layer that reaches a submicron depth. Due to a significant modulus mismatch between the stiff surface-modified layer and the compliant bulk PDMS the surface-modified layer forms intricate patterns of surface buckles when under compressive stress and nano-cracks when under tensile stress. It is desirable to be able to design patterns of nano-cracks, or at least to have an understanding of them. Among the properties necessary to do this are the thickness and elastic modulus of the surface-modified layer. Due to the very small length scale of the surface-modified layer, it is a significant challenge to measure these properties. In this proceedings paper, a two-step method is described for determining the thickness and elastic modulus of the surface-modified layer using the atomic force microscope (AFM). First, nanoindentation is performed from which the bending stiffness of the surface-modified layer is calculated. Second, the surface-modified layer thickness is determined by using phase imaging on the cross-section of oxidized PDMS to map the region of the relatively stiffer surface-modified layer.

Keywords

nanoscaleelastic propertiesfilm
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 924: Symposium Z – Mechanics of Nanoscale Materials and Devices , 2006 , 0924-Z07-08
Copyright
Copyright © Materials Research Society 2006

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