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Properties of Tetrahedral Amorphous Carbon Deposited by A Filtered Cathodic Vacuum ARC

  • M Chhowalla (a1), C W Chen (a1), B Kleinsorge (a1), J Robertson (a1), G A J Amaratunga (a1) and W I Milne (a1)...

Abstract

The properties of a highly sp3 bonded form of amorphous carbon denoted ta-C deposited from a filtered cathodic vacuum arc (FCVA) are described as a function of ion energy and deposition temperature. The sp3 fraction depends strongly on ion energy and reaches 85% at an ion energy of 100 eV. Other properties such as density and band gap vary in a similar fashion, with the optical gap reaching a maximum of 2.3 eV. These films are very smooth with area roughness of order 1 nm. The sp3 fraction falls suddenly to almost zero for deposition above about 200°C.

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Properties of Tetrahedral Amorphous Carbon Deposited by A Filtered Cathodic Vacuum ARC

  • M Chhowalla (a1), C W Chen (a1), B Kleinsorge (a1), J Robertson (a1), G A J Amaratunga (a1) and W I Milne (a1)...

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