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Properties of Metal / Polyphenylquinoxaline Interfaces

Published online by Cambridge University Press:  25 February 2011

L. Bellard ,
J.M. Themlin ,
F. Palmino  and
A. Cros
L. Bellard
Affiliation:
URA CNRS 783, Faculté des Sciences de Luminy Département de Physique, Case 901 13288 Marseille Cedex 9, France
J.M. Themlin
Affiliation:
URA CNRS 783, Faculté des Sciences de Luminy Département de Physique, Case 901 13288 Marseille Cedex 9, France
F. Palmino
Affiliation:
URA CNRS 783, Faculté des Sciences de Luminy Département de Physique, Case 901 13288 Marseille Cedex 9, France
A. Cros
Affiliation:
URA CNRS 783, Faculté des Sciences de Luminy Département de Physique, Case 901 13288 Marseille Cedex 9, France
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Abstract

We have investigated the microscopic properties of copper and chromium layers deposited on polyphenylquinoxaline (PPQ). PPQ is a thermostable polymer used for multichip module applications. The metal is deposited under ultra-high vacuum conditions and analysed in-situ by X-ray photoemission (XPS) and atomic force microscopy (ex situ). Copper does not react significantly with the PPQ and tends to diffuse into the polymer matrix upon annealing. On the contrary, chromium strongly reacts with the polymer surface at room temperature. With increasing metal coverage, chromium grows in a layer-by-layer mode and the reacted interface is progressively burried under the pure metal layer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 337: Symposium B – Advanced Metallization for Devices and Circuits—Science, Technology and Manufacturing III , 1994 , 715
Copyright
Copyright © Materials Research Society 1994

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References

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