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Production of Y‐Ba‐Cu‐0 Superconducting Thin Films by an Aerosol Chemical Vapor Deposition Process

Published online by Cambridge University Press:  28 February 2011

A. Driessen ,
Q. Tang ,
L. Hilderink  and
Th.J.A. Popma
A. Driessen
Affiliation:
University of Twente, Faculty of Applied Physics, P.O.Box 217, 7500 AE Enschede, The Netherlands
Q. Tang
Affiliation:
University of Twente, Faculty of Applied Physics, P.O.Box 217, 7500 AE Enschede, The Netherlands
L. Hilderink
Affiliation:
University of Twente, Faculty of Applied Physics, P.O.Box 217, 7500 AE Enschede, The Netherlands
Th.J.A. Popma
Affiliation:
University of Twente, Faculty of Applied Physics, P.O.Box 217, 7500 AE Enschede, The Netherlands
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Abstract

Thin film production by aerosol deposition is a simple, non‐vacuum method, which under certain conditions of the process parameters, can be considered as a chemical vapor deposition (CVD) process. In this paper we describe the formation of superconducting thin films by aerosol deposition in the CVD regime by using metal‐organic precursors. The best results were obtained with the metal β‐diketonates of Y, Ba and Cu dissolved in butylacetate. This solution was nebulized and sprayed on a heated Si‐substrate with a Zr02‐buffer layer at a temperature of 450 C. After deposition a final heat treatment at a temperature of 800 C was applied. The resulting superconducting film has a Tc>2ero of 75 K.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 169: Symposium M – High Temperature Superconductors: Fundamental Properties and Novel Materials Processing , 1989 , 601
Copyright
Copyright © Materials Research Society 1990

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