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Production of Microstructures by Laser Pyrolysis

  • Dieter Bä;uerle (a1)

Abstract

Laser pyrolysis at short wavelengths is a powerful tool for micron-sized one-step local deposition of insulating, semiconducting and metallic materials from the gas phase. Various structures, e.g. stripes on different substrates, and rods of various lengths and diameters, have been produced. The morphology of the deposited material, the deposition rate, and the dimensions (typically 1-300 μm) of the structures were investigated quantitatively as functions of laser irradiance local temperature, laser focus diameter, scanning velocity, and gas pressure.

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1. Lydtin, H. in: Proc. 3rd Int. Conf. on Chemical Vapor Deposition, Glaski, F. A. ed., Hinsdale 1972, pp. 121.
2. Nelson, L. S. and Richardson, N. L., Mat. Res. Bull. 7, 971 (1972).
3. Berg, R. S. and Mattox, D. M. in: Proc. 4th Int. Conf. on Chemical Vapor Deposition, Glaski, F. A. ed., Hinsdale 1973, pp. 196–204.
4. Christensen, C. P. and Lakin, K. M., Appl. Phys. Lett. 32, 254 (1978).
5. Allen, S. D. and Bass, M., J. Vac. Sci. Technol. 16, 431 (1979).
6. Baranauskas, V. et al. , Appl. Phys. Lett. 36, 930 (1980).
7. Leyendecker, G. et al. , Appl. Phys. Lett. 39, 921 (1981).
8. Bäuerle, D. et al. , Appl. Phys. B 28, 267 (1982).
9. Leyendecker, G. et al. , J. Electrochem. Soc. (1982).
10. Ehrlich, D. J. et al. , Appl. Phys. Lett. 39, 957 (1981).
11. Bäuerle, D. et al. , Appl. Phys. Lett. 40, 819 (1982).
12. Rytz-Froidevaux, Y. et al. , Appl. Phys. A 27, 133 (1982).
13. Kräuter, W. and Bäuerle, D., Appl. Phys. (1982).
14. For a review see e. g.: Ehrlich, D. J. et al. , IEEE J. Quantum Electron.,. QE 16, 1233 (1980).
15. For a review see e. g.: Bloem, J. and Giling, L. J. in: Current Topics in Materials Science, Kaldis, E. ed. (North-Holland, New York 1978) Vol. 1, pp. 147342.
16. Kräuter, W. et al. , (to be published).
17. Palmer, H. B. and Cullis, C, F., Chemistry and Physics of Carbon 1, 265 (1965).
18. Eversteijn, F. C., Philips Res. Repts. 26, 134 (1971).
19. Purnell, J. H. and Walsh, R., Proc. R. Soc. A 293, 543 (1966).
20. Lampert, M. O. et al. , J. Appl. Phys. 52, 4975 (1981).

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