Skip to main content Accessibility help
×
Home

Principles and Performance of a PC-Based Program for Simulation of Double-Axis X-Ray Rocking Curves of Thin Epitaxial Films

  • D. Keith Bowen (a1), Neil Loxley (a1), Brian K. Tanner (a1), Lynne Cooke (a1) and Michael A. Capano (a2)...

Abstract

PC-based software for the rapid simulation of double-axis X-ray rocking curves from epitaxial thin films by solution of the Takagi-Taupin equations is described. The principles of the mathematical model are discussed. Graded layers and interface roughness are treated by piece-wise approximation to linear or quadratic functions and fractional relaxation of each epilayer may be included. The reliability of the data-bases incororated are examined and the requirement for internal consistency demonstrated. Bench-mark tests are reported for various PC-compatible microcomputers. The shift in epilayer peak position, which occurs experimentally on reducing layer thickness at constant composition, is predicted in the simulations and compared with other simulated data in the literature. Detailed studies of generated data have been undertaken and compared with independent simulations and experimental data. Agreement is excellent.

Copyright

References

Hide All
1. Takagi, S., Acta Cryst 15, 1311 (1962).
2. Taupin, D., Bull. Soc. Fr. Min. Crist. 87, 469 (1964).
3. Halliwell, M. A. G., Juler, J. and Norman, A. G., Inst. Phys. Conf. Ser. 67, 365 (1983).
4. Wie, C. R., J. Appl. Phys. 66, 985 (1989).
5. International Tables for X-ray Crystallography, Kynoch Press, 1988.
6. Landau, L. D. and Lifshitz, E. M., Elasticity (Pergamon, Oxford 1972).
7. Hart, M., in Characterization of Crystal Growth Defects by X-ray Methods, edited by Tanner, B. K. and Bowen, D. K. (Plenum, New York, 1980) pp 421432.
8. Hill, M. J., Tanner, B. K., Halliwell, M. A. G. and Lyons, M. H., J Appl. Cryst. 18, 446 (1985).
9. Green, G. S., Tanner, B. K., Barnett, S. J., Enemy, M., Pitts, A. D., Whitehouse, C. R. and Clark, G. F., Phil. Mag. Letts. 62, 131 (1990).
10. Holloway, H., J. Appl. Phys. 67, 6229 (1990).
11. Bowen, D. K. et al, Mater. Res. Soc. Symp. Proc. (1991) this conference.
12. Bowen, D. K., Hart, L., Polcarova, M., Thomas, C. R. and Fisher, G. R., Nanotechnology 2 (1991), in press.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed