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Preparation of The Double-Sided YBa2Cu3O7-δ Thin Film by Hot-Wall Type Mocvd

  • Y. Ito (a1), M. Iwata (a2), Y. Yoshida (a1), Y. Takai (a2) and I. Hirabayashi (a1)...

Abstract

A hot-wall type metal organic chemical vapor deposition (MOCVD) apparatus has been developed for the deposition of the YBa2Cu3O7-δ (YBCO) films using liquid metal organic sources on arbitrary shaped substrates. By improving the reactor shape and gas flow of the source materials, we succeeded in fabricating the double-sided YBCO films for electronic and microwave devices and the YBCO-coated conductor on oxide fiber for power applications. T c(zero)'s of the YBCO film on both sides of the LaAlO3 (100) substrate were 90K and 86K, respectively. The films on the facet of the single crystalline SrTiO3 fiber showed the single phase c-axis orientation with biaxially alignment in the a / b plane.

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