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The Preparation of Some Silicon (OXY)Nitrides

  • Peter W. Lednor (a1) and René De Ruiter (a1)


Various routes to silicon (oxy)nitrides are described, using both low-temperature solution chemistry and high temperature gas-solid reactions. The latter approach has led to a convenient synthesis of high-surface-area (e.g. 130 m g) silicon oxynitride, Si2N2O, from gaseous ammonia and commercially available, finely divided amorphous silica.



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