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Preparation of Semiconductor Cross Sections by Cleaving

  • Crispin J. D. Hetherington (a1)

Abstract

The practical details are presented for preparing cross-sectional samples of semiconductor epitaxial layers by cleaving. Examples of results are shown and a number of possible applications for the samples are discussed. A variation of the method can be used to prepare a TEM sample of a high Tc superconductor.

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Preparation of Semiconductor Cross Sections by Cleaving

  • Crispin J. D. Hetherington (a1)

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