Thepreparation of modified lead titanate (0.PbTiO3-Pb(Mg0.5W0.5)O3) thin films by pulsed excimer laser deposition on Pt-coated Si substrates has been studied. Films were prepared with substrate temperatures of 300–650°C, and ambient oxygen pressures of 2.7–4OPa. Phase formation and morphology of the films varied according to deposition conditions. At 650°C, 40Pa, well-crystallized perovskite single phase films were obtained. Most films were ferroelectric and showed preferred orientation which could be correlated with the texture of the underlying platinum. The effect of preferred orientation on the dielectric properties of the films is discussed.