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Preparation of Pb-Based Ferroelectric thin films by Ion- and Photo-Assisted Deposition

  • Shigenori Hayashi (a1), Kenji Iijima (a1) and Takashi Hirao (a1)

Abstract

Thin film process for Pb-based perovskite ferroelectrics has been investigated. Synthesis of epitaxial PLZT, PLT and PZT thin films by rfmagnetron sputtering in our laboratory was reviewed. Basic thin film process and applications were discussed. For further investigation, film preparation process was developed by co-deposition and assisted deposition techniques. The substrate temperature required for in-situ preparation of perovskite could be reduced to room temperature by an ion- and photoassisted co-evaporation technique.

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