Skip to main content Accessibility help
×
Home

Preparation of High-Quality a-SiGe:H films with Low Impurity Oncentration by the Hydrogen Dilution Method

  • Katsunobu Sayama (a1), Hisao Haku (a1), Hiroshi Dohjoh (a1), Masao Isomura (a1), Noboru Nakamura (a1), Shinya Tsuda (a1), Yasuo Kishi (a1), Shouichi Nakano (a1) and Yukinori Kuwano (a1)...

Abstract

A-SiGe: H film properties with a low impurity concentration were investigated using a super chamber in the range of Ge content of 0% to 36%. These a-SiGe films can maintain a high photosensitivity of about 106 for Ge content up to 13%, which is comparable to high-quality a~Si films. It was found that impurity incorporation deteriorates optoelectronic properties in the range of a small amount of Ge content, and film rigidity in the range of a large amount of Ge content. Using high-quality a-SiGe films with a low impurity concentration in solar cells, the highest conversion efficiency of 3.15% was obtained for an a-SiGe single-junction cell under red light (AM-1.5, 100mW/cm2 light through the optical filter, in which the wavelength of transmitted light is longer than 650nm). A stacked cell of a-Si/a-Si/a-SiGe has a conversion efficiency of 11.9%.

Copyright

References

Hide All
[1] Hishikawa, Y. et al. in Proceedings of the 9th E.C. Photovoltaic Solar Energy Conference, Freiburg (1989) 37
[2] Menna, P. et al. in Proceedings of the 19th IEEE Photovoltaic Specialists Conference, Louisana (1987) 832
[3] Zeman, M. et al. in Technical Digest of the 5th International Photovoltaic Science and Engineering Conference, Kyoto (1990) 43

Preparation of High-Quality a-SiGe:H films with Low Impurity Oncentration by the Hydrogen Dilution Method

  • Katsunobu Sayama (a1), Hisao Haku (a1), Hiroshi Dohjoh (a1), Masao Isomura (a1), Noboru Nakamura (a1), Shinya Tsuda (a1), Yasuo Kishi (a1), Shouichi Nakano (a1) and Yukinori Kuwano (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed