Skip to main content Accessibility help

Preparation of a Supported Si3N4 Membrane for Gas Filters

  • Fei Cheng (a1), Stephen M. Kelly (a1), Stephen Clark (a1) and John S. Bradley (a1)


A supported Si3N4 membrane was prepared via a non-aqueous sol-gel process using tris(dimethylamino)silylamine, H2NSi(NMe2)3, as a starting material. The SEM image indicated the formation of the Si3N4 membrane with thickness about 2.3 μ m on the surface of the α-Al2O3 support. Nitrogen adsorption analysis indicated that, although most of the pores were similar to those of the α-Al2O3 disk, a new pore size distribution of 20–50 Å for the Si3N4 membrane was observed. The new membrane demonstrates high selective absorption of NO2, suggesting a potential application as a selective filter for gas sensors.



Hide All
1. Kusakabe, K., Li, Z. Y., Masda, H. and Morooka, S., J. Membrane Sci., 103, 175 (1995).
2. Kurada, K., Kubo, N. and Yazawa, T., J. Sol-Gel Sci. and Technol., 19, 515 (2000).
3. Menini, P., Parret, F., Guerrero, M., Martinez, A., Soulantica, K., Erades, L., Maisonnat, A. and Chaudret, B., Sens. & Actuators B, 103, 111 (2004).
4. Fau, P., Sauvan, M., Trautweiler, S., Nayral, C., Erades, L., Maisonnat, A. and Chaudret, B., Sens. & Actuators B, 78, 83 (2001).
5. Brinker, C. J. and Schere, G. W., Sol-Gel Science, Academic Press, London, 1990.
6. Rovai, R., Lehmann, C. W. and Bradley, J. S., Angew. Chem. Int. Ed., 38, 2036 (1999).
7. Cheng, F., Clark, S., Kelly, S. M., Bradley, J. S. and Lefebvre, F., J. Am. Ceram. Soc., 87, 1413 (2004).
8. Baumbach, M., Schütze, A., Cheng, F., Kelly, S. M., Delprat, H., Parret, F., Menini, P., Soulantica, K., Chaudret, B. and Maisonat, A., Proceedings IEEE Sensors Conference 2004, Vienna, Austria, Oct. 25-27, 2004.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed