Skip to main content Accessibility help

Preparation and Properties of Polysilsesquioxanes - Polysilsesquioxanes as a Candidate to a Low Dielectrics for Electronic Devices -

  • Yoshimoto Abe (a1), Keiko Kagayama (a1), Norihiro Takamura (a1) and Takahiro Gunji (a1)


Polysilsesquioxanes PSSQ as a candidate of coatings for interlayer low dielectric films were synthesized by acid and base catalyzed hydrolytic polycondensation of RSi(OMe)3 (R=methyl, vinyl, 3-methacryloxypropyl). Dip and spin coating of PSSQ on organic and inorganic substrates followed by curing at 100 °C, 400 °C, and 450 °C provided transparent and tough coating films of thickness 2000–9000 A. Polysilsesquioxanes adhered strongly to the substrates to form coating films of which the adhesion strength and hardness were 10 and 9H based on JIS K5400 comparable to ISO standard, as heating time and molecular weight increase. On curing at the elevated temperatures, they provided the films with a very smooth surface and the dielectric constants of 3.2∼3.6 (R=3-methacryloxypropyl), 3.8∼4.0 (R=vinyl), and 2.5∼2.7 (R=methyl) depending on film thickness and molecular weight of PSSQ. The films from PSSQ (R=methyl) were found to be porous compared with those from PSSQ (R=vinyl).



Hide All
1) Izumi, K., Tanaka, H., Uchida, Y., Tohge, N., and Minami, T., J. Non-Crystal. Solids 147 & 148,483 (1992)10.1016/S0022-3093(05)80663-5
2) Etienne, P., Denape, J., Paris, J. Y., Phalippou, J., and Sempere, R., J. Sol-Gel Sci. & Tech. 6 287 (1993)10.1007/BF00402701
3) Iwashita, K., Tadanaga, K., and Minami, T., J. Apply. Poly. Sci. 61 2173 (1996)10.1002/(SICI)1097-4628(19960919)61:12<2173::AID-APP16>3.0.CO;2-8
4) Tadanaga, K., Azuta, K., and Minami, T., J. Ceram. Soc. Jpn., 105 555 (1997)10.2109/jcersj.105.555
5) Stamper, A., Proceeding of 3rd International DUMIC Conference, p. 9 (1997);
Kazuo, M., Denshi Zairyo 37, 2229 (1998);
Furusawa, T., Homma, Y., Shimamura, Y., Morishima, H., Yamamoto, Y., and Satoh, H., Denshi-Jyoho-Tsuushin Gakkai Ronbunshi J78–C–II (5), 193 (1995)
6) Abe, Y., Taguchi, K., Hatano, H., Gunji, T., Nagao, Y., and Misono, T., J. Sol-Gel Sci. & Tech. 2, 131 (1994);10.1007/BF00486226
Abe, Y., Hatano, H., and Gunji, T., J. Polym. Sci.: Part A: Polym. Chem. Ed. 33, pp. 751 (1995);10.1002/pola.1995.080330416
Takamura, N., Taguchi, K., Gunji, T., and Abe, Y., J. Polym. Sci.: Part A: Polym. Chem. Ed. in press.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed