Skip to main content Accessibility help

Preparation and Electrical Characteristics of (100), (111), and Randomly Oriented PZT Thin Films

  • Chang Jung Kim (a1), Dae Sung Yoon (a1), Joon Sung Lee (a1), Chaun Gi Choi (a1), Won Jong Lee (a2) and Kwangsoo No (a1)...


The (100), (111) and randomly oriented PZT thin films were fabricated on Pt/Ti/Coming 7059 glass using sol-gel method. The thin films having different orientation were fabricated by different drying conditions for pyrolysis. The preferred orientations of the PZT thin films were observed using XRD, rocking curves, and pole figures. The microstructures were investigated using SEM. The hysteresis loops and capacitance-voltage characteristics of the films were investigated using a standardized ferroelectric test system. The dielectric constant and current-voltage characteristics of the films were investigated using an impedance analyzer and pA meter, respectively. The films oriented in a particular direction showed superior electrical characteristics to the randomly oriented films.



Hide All
1. Tamagawa, T., Polla, D.L., and Hseuch, C.-C., IEEE International Elecrtron Device Meeting, San Francisco, Dec. 1990, p. 617.
2. Polla, D.L., Ye, Chian-Ping and Tamagawa, Takashi, Appl. Phys. Lett. 59 (27), 3539 (1991)
3. Araujo, C.A., McMillan, L.D., Melnick, B.M., Cuchiaro, J.D., and Scott, J.F., Ferroelectrics 104, 241 (1990).
4. Kim, C.J., Yoon, D.S., Lee, J.S., Choi, C.G. and No, K., Jpn. J. Appl. Phys. 33, part 1, No. 5, 2675 (1994).
5. Hellwege, K.-H. and Hellwege, A.M., Ferroelectrics : oxides. III. 16, (Springer-Verlag Berlin-Heidelberg-New York, 1981), p. 122.
6. Takayama, Ryoichi and Tornita, Yoshihiro, J. Appl. Phys. 65 (4), 1666 (1989).
7. Vorotilov, K.A., Yanovskaya, M.I. and Dorokuova, O.A., Integrated Ferroelectrics, 3, 33 (1994).
8. Lee, H.Y., Lee, K.C., Schunke, J.N. and Burton, L.C., IEEE Transaction on Components, Hybrids and Manufacturing Technology, 7, 443 (1984).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed